Laboao 1600°C Vacuum Atmosphere Tube Furnace CVD System

• Customization: Available
• After-sales Service: Online Service
• Warranty: 12months
• Model NO.: CVD-LTF16P/ CVD-LTF16T Series
• Application: Industry, School, Hospital, Lab, University
• Customized: Customized
• Certification: CE, ISO, RoHS, CCC
• Structure: Desktop
• Material: Steel
• Type: Tubular Furnace
• Product Name: 1600°C Vacuum Atmosphere Tube Furnace
• Operating Temperature Range: 300~1600℃
• Temperature Resolution: 1°C
• Temperature Accuracy: ±1°C
• Heating Rate: 0-20°C/Min
• Heating Zone Length: 260mm
• Furnace Body: Polycrystalline Mullite Fiber
• Furnace Size: 440*390*330
• Furnace Tube: Corundum Tube
• Heater: Silicon Molybdenum Rod
• Heating Power: 4kw
• Thermal Insulation Layer: Double-Layer Forced Air Diversion
• Timing: 0~999.9 Hours
• Run Function: Fixed Value Operation, Program Operation
• Sensor: Type S Thermocouple
• Transport Package: Standard Export Plywood Case
• Specification: 440*390*330 mm
• Trademark: LABOAO
• Origin: China
• HS Code: 8514199000
• Production Capacity: 1000sets/Month
• Package Size: 78.00cm * 39.00cm * 33.00cm
• Package Gross Weight: 100.000kg

Product Description

Product Description

1600°C vacuum/atmosphere tube furnace CVD system (CVD-TF) provides an experimental environment with vacuum, controllable atmosphere and high temperature, and is used in semiconductor, nanotechnology, fiber and other fields. This CVD growth system is suitable for CVD process , such as silicon carbide coating, ceramic substrate conductivity test, controllable growth of ZnO nanostructure, ceramic capacitor (MLCC) atmosphere sintering and other experiments.

Features

1.The furnace is made of polycrystalline mullite fiber vacuum adsorption, the temperature field is uniform and energy saving is more than 50%

2.The self-developed air diversion and heat insulation technology ensures the service life and constant temperature effect of each component in the box

3.When the electric furnace is started, the exhaust fan will automatically run at the same time. After the test, the exhaust fan will continue to run until the temperature of the furnace body is lower than 60 °C, and the exhaust fan will stop automatically, which effectively protects the surface of the furnace body.

4.The furnace door is opened with automatic power-off, over-temperature protection function, and leakage protection function to ensure the safety of use.

5.The circuit adopts continuous heating output mode, dual-circuit power supply, and separate wiring of strong and weak current improves the stability of the system

6.The heating module adopts DC signal to adjust the output power, which avoids the interference of induced electricity to the control signal.

7.Low-voltage metal buttons are used for operation buttons, with status indicator lights, safe and intuitive operation.

8.The upper and lower furnace bodies are connected by aviation plugs, which are safe, reliable and convenient to connect.

9.The gas circuit assembly is made of food grade 316 stainless steel, which has corrosion resistance, atmospheric corrosion

 resistance and high temperature resistance, and is non-magnetic

10.Adopt digital flow display instrument, cooperate with mass flow controller, collect data and control flow. It has the characteristics of good repeatability, fast response speed, stability and reliability. (Gas Mass Flow Control System)

11.Automatic control and manual control switching function, the automatic control mode can automatically open/close the vacuum pump through the set value, so that the container can be kept within a certain vacuum pressure range. Manual control mode uses the user to directly operate the vacuum pump via the vacuum pump on/off button. to meet the needs of different experiments. (Medium vacuum control system)

12.The solenoid valve slow start technology makes the solenoid valve open 10 seconds after the vacuum pump is turned on, so that the system pressure in the furnace tube is kept accurate, and it also ensures that the exhaust gas will not return to the furnace tube system to affect the experimental effect (medium vacuum control system)

13.Overheating alarm, menu lock, overheating prevention, power recovery delay.

14.Using one-way valve technology, the gas flow is controlled within a controllable pressure range to ensure safety.

15.The gas mixing tank device is adopted, so that the gas can be introduced into the working room after being fully mixed to ensure that it will not leak.

Specification

Model		Single   temperature zone				Double   temperature zone
		CVD-LTF16P50	CVD-LTF16P60	CVD-LTF16P80	CVD-LTF16P100	CVD-LTF16P60S	CVD-LTF16P80S	CVD-LTF16P100S
		CVD-LTF16T50	CVD-LTF16T60	CVD-LTF16T80	CVD-LTF16T100	CVD-LTF16P60S	CVD-LTF16T80S	CVD-LTF16T100S
Performance	Operating temperature   range	300~1600℃
	Temperature   resolution	1℃
	Temperature   control	± 1℃
	Heating rate	0~20℃/min
	Heating zone   length	260mm				600mm
	Length of   constant temperature zone	120mm				300mm
	degree of   vacuum	-0.1MPa
	Empty   furnace heating time	<15min
Composition	Exterior	Cold-rolled   steel sheet with chemical-resistant coating on the surface
	Furnace body	Polycrystalline   Mullite Fiber
	Furnace size	440*390*330				780*390*330
	Furnace tube	Corundum   Tube
	Furnace tube   size	φ50*1000	φ60*1000	φ80*1000	φ100*1000	φ60*1200	φ80*1200	φ100*1200
	Heater	Silicon   molybdenum rod
	Heating   power	4KW		4KW		10KW	10KW
	Thermal   insulation layer	Double-layer   forced air diversion
Controller	Controller	P: Imported   program temperature control digital display; T: 7-inch color touch screen   program temperature control
	Control   method	Use   microcomputer PID control / S-type dual temperature zone separate temperature   control
	How to set	P: Touch the   five buttons for action, digital display setting; T: Touch the finger to set
	Display   method	P:   Double-line LED digital display; T: Color LCD display
	Timing	0~999.9   hours
	Run function	Fixed value   operation, program operation
	Program mode	P: Program running,   4 curves, 40 steps in total; T: 50 steps can call the stored program
	Sensor	Type S   thermocouple
	Auxiliary   function	P:   Correction function; T: Correction function, real-time curve recording, U   disk data export
	Safety   equipment	Overcurrent   leakage protection switch				Overcurrent   protection switch
Mass Flow   Control System	Number of   air paths	3 channels   (the number of air channels can be selected according to specific needs)
	Flow range	0-0500sccm   (standard ml/min, optional) nitrogen standard
	Precision	±1%F.S
	Response   time	≤4s
	Operating   temperature (flow meter)	5-45℃
	Work   pressure	Inlet   pressure 0.05-0.3MPa (gauge pressure)
	System   connection	Adopt KF   quick connection bellows, high vacuum manual flapper valve and digital   display vacuum measuring instrument
Medium   vacuum control system	System   vacuum range	10-100Pa
Vacuum pump		The   theoretical ultimate vacuum degree of the two-stage mechanical pump is 3x10-1Pa,   the pumping rate is 4L/s, the air outlet is equipped with an oil filter, the   rated voltage is 200V, and the power is 0.55Kw
CVD system   configuration		1600 degree   vacuum tube furnace (optional single temperature zone, double temperature   zone) Multi-channel mass flow control system Vacuum system